Ngo, Anh TuanAnh TuanNgoDey, BappadityaBappadityaDeyHalder, SandipSandipHalderDe Gendt, StefanStefanDe GendtWang, ChanghaiChanghaiWang2024-03-122023-03-182023-03-202024-03-1220230894-6507WOS:000935143900001https://imec-publications.be/handle/20.500.12860/41302Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic ReviewJournal article review10.1109/TSM.2022.3217326WOS:000935143900001