Machkaoutsan, VladimirVladimirMachkaoutsanWeeks, DoranDoranWeeksBauer, MatthiasMatthiasBauerMaes, JanJanMaesTolle, JohnJohnTolleThomas, ShawnShawnThomasAlian, AliRezaAliRezaAlianHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLoo2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21071High efficiency low temperature pre-epi clean method for advanced group IV epi processingProceedings paper