Sun, YitingYitingSunKrishtab, MikhailMikhailKrishtabStruyf, HerbertHerbertStruyfVerdonck, PatrickPatrickVerdonckDe Feyter, StevenStevenDe FeyterBaklanov, MikhaïlMikhaïlBaklanovArmini, SilviaSilviaArmini2021-10-222021-10-2220140743-7463https://imec-publications.be/handle/20.500.12860/24577Impact of plasma pretreatment and pore size on the sealing of ultra low-k dielectrics by self-assembling monolayersJournal articlehttp://pubs.acs.org/doi/abs/10.1021/la404165n