Assessment of tunnel oxide and poly-Si channel traps in 3D SONOS memory before and after P/E cycling

Lee, Ko-HuiKo-HuiLeeDegraeve, RobinRobinDegraeveToledano Luque, MariaMariaToledano LuqueArreghini, AntonioAntonioArreghiniBreuil, LaurentLaurentBreuilBlomme, PieterPieterBlommeVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-2220150167-9317https://imec-publications.be/handle/20.500.12860/25524Assessment of tunnel oxide and poly-Si channel traps in 3D SONOS memory before and after P/E cyclingJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931715002221