Vandooren, AnneAnneVandoorenWitters, LiesbethLiesbethWittersFranco, JacopoJacopoFrancoMallik, ArindamArindamMallikParvais, BertrandBertrandParvaisWu, ZhichengZhichengWuLi, WaikinWaikinLiRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyPeng, LanLanPengRassoul, NouredineNouredineRassoulJamieson, GeraldineGeraldineJamiesonInoue, FumihiroFumihiroInoueVerbinnen, GreetGreetVerbinnenDevriendt, KatiaKatiaDevriendtTeugels, LieveLieveTeugelsHeylen, NancyNancyHeylenVecchio, EmmaEmmaVecchioTao, ZhengZhengTaoWaldron, NiamhNiamhWaldronBoemmels, JuergenJuergenBoemmelsDe Heyn, VincentVincentDe HeynMocuta, DanDanMocutaRyckaert, JulienJulienRyckaertCollaert, NadineNadineCollaert2021-10-262021-10-262018-10https://imec-publications.be/handle/20.500.12860/32141Key challenges and opportunities for 3D sequential integrationProceedings paperhttps://ieeexplore.ieee.org/document/8640203