Selective area growth on planar masked InP substrates by metal organic vapour phase epitaxy (MOVPE)

Van Caenegem, TomTomVan CaenegemMoerman, IngridIngridMoermanDemeester, PietPietDemeester2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2203Selective area growth on planar masked InP substrates by metal organic vapour phase epitaxy (MOVPE)Journal article