Proshina, OlgaOlgaProshinaRakhimova, TatyanaTatyanaRakhimovaBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/229591-D model of RF CCP discharge in Ar/CF4/CF3I gas mixturesMeeting abstract