Evaluation of Si surface conditions by the use of surface photovoltage technique

Trauwaert, Marie-AstridMarie-AstridTrauwaertKenis, KarineKarineKenisCaymax, MattyMattyCaymaxMertens, PaulPaulMertensHeyns, MarcMarcHeynsVanhellemont, J.J.VanhellemontGräf, D.D.GräfWagner, P.P.Wagner2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2998Evaluation of Si surface conditions by the use of surface photovoltage techniqueProceedings paper