Marcon, DenisDenisMarconDe Jaeger, BriceBriceDe JaegerHalder, SandipSandipHalderVranckx, NickNickVranckxMannaert, GeertGeertMannaertVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutere2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21093Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fabProceedings paper