Sakai, AkiraAkiraSakaiOhara, YujiYujiOharaUeda, TakayaTakayaUedaToyoda, EijiEijiToyodaIzunome, KojiKojiIzunomeTakeuchi, ShotaroShotaroTakeuchiShimura, YosukeYosukeShimuraNakatsuka, OsamuOsamuNakatsukaOgawa, MasakiMasakiOgawaZaima, ShigeakiShigeakiZaimaKimura, ShigeruShigeruKimura2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14411Interface and defect control for group IV channel engineeringProceedings paper