Oniki, YusukeYusukeOnikiRagnarsson, Lars-AkeLars-AkeRagnarssonHideaki, IinoIinoHideakiCott, DaireDaireCottChan, BTBTChanSebaai, FaridFaridSebaaiHopf, TobyTobyHopfDekkers, HaroldHaroldDekkersDentoni Litta, EugenioEugenioDentoni LittaAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37028Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scalingProceedings paperhttps://doi.org/10.4028/www.scientific.net/SSP.314.119