Nonlinear silicon nitride waveguides based on a PECVD deposition platform

Wang, LinghuaLinghuaWangXie, WeiqiangWeiqiangXieVan Thourhout, DriesDriesVan ThourhoutZhang, YazhenYazhenZhangYu, HuiHuiYuWang, ShaohaoShaohaoWang2021-10-262021-10-262018-041094-4087https://imec-publications.be/handle/20.500.12860/32241Nonlinear silicon nitride waveguides based on a PECVD deposition platformJournal articlehttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-26-8-9645