Sturtevant, John L.John L.SturtevantHong, LeLeHongJayaram, SrividyaSrividyaJayaramRenwick, Stephen P.Stephen P.RenwickMcCallum, MartinMartinMcCallumDe Bisschop, PeterPeterDe Bisschop2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14523Impact of illumination source symmetrization in OPCProceedings paper