Pantouvaki, MariannaMariannaPantouvakiHuffman, CraigCraigHuffmanZhao, LarryLarryZhaoHeylen, NancyNancyHeylenOno, YYOnoNakajima, MMNakajimaNakatani, KKNakataniBeyer, GeraldGeraldBeyerBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-1920110021-4922https://imec-publications.be/handle/20.500.12860/19536Advanced organic polymers for the aggressive scaling of low-k materialsJournal article