Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition process

Armini, SilviaSilviaArminiHerregods, SebastiaanSebastiaanHerregodsTokei, ZsoltZsoltTokeiCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayLee, Wei TiWei TiLeeLarson, TomTomLarsonFigueiro, NiveaNiveaFigueiroKoret, RoyRoyKoretWolfling, ShayShayWolfling2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30144Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition processOral presentation