Wouters, LennaertLennaertWoutersBoehme, ThijsThijsBoehmeMana, LucaLucaManaHantschel, ThomasThomasHantschel2023-11-282023-08-202023-11-2820232590-0072WOS:001042745300001https://imec-publications.be/handle/20.500.12860/42367Self-patterned ultra-sharp diamond tips and their application for advanced nanoelectronics device characterization by electrical SPMJournal article10.1016/j.mne.2023.100195WOS:001042745300001SILICONDEPOSITIONRESOLUTIONDOPANTPROBES