Driving the industry towards a consensus on high numerical aperture (High-NA) extreme ultraviolet (EUV)

Kearney, PatrickPatrickKearneyWood, ObertObertWoodHendrickx, EricEricHendrickxMcIntyre, GregGregMcIntyreSoichi, InoueInoueSoichiGoodwin, FrankFrankGoodwinWurm, StephanStephanWurmVan Schoot, JanJanVan SchootKaiser, WinfriedWinfriedKaiser2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24046Driving the industry towards a consensus on high numerical aperture (High-NA) extreme ultraviolet (EUV)Proceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2048397