Material characteristics and damascene patterning of a fluoropolymer low-k film

Struyf, HerbertHerbertStruyfDonaton, R. A.R. A.DonatonLepage, MurielMurielLepageLanckmans, FilipFilipLanckmansVereecke, GuyGuyVereeckeMaex, KarenKarenMaexVanhaelemeersch, SergeSergeVanhaelemeerschScheid, D.D.Scheid2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4778Material characteristics and damascene patterning of a fluoropolymer low-k filmOral presentation