ESD challenges in advanced FinFET and GAA nanowire CMOS technologies

Chen, Shih-HungShih-HungChen2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32693ESD challenges in advanced FinFET and GAA nanowire CMOS technologiesProceedings paperhttps://ieeexplore.ieee.org/document/8780136