Roelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11116Ultra-thin benzocyclobutene bonding of III-V dies onto SOI substrateJournal article