Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing

Chehadi, ZeinabZeinabChehadiDaubriac, RichardRichardDaubriacLu, LuLuLuHuet, KarimKarimHuetTokei, ZsoltZsoltTokeiCancellara, LeonardoLeonardoCancellaraCristiano, FuccioFuccioCristianoThuries, LouisLouisThuries2025-06-052025-03-062025-06-052024979-8-3503-8518-22380-632XWOS:001411360600020https://imec-publications.be/handle/20.500.12860/45333Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealingProceedings paper10.1109/IITC61274.2024.10732322979-8-3503-8517-5WOS:001411360600020