Ling, FangzhouFangzhouLingDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwCelis, J. P.J. P.CelisDe Wolf, IngridIngridDe Wolf2021-10-202021-10-2020120026-2714https://imec-publications.be/handle/20.500.12860/21034Study of glass frit induced stiction using a micromirror arrayJournal article