Surface nanopatterning of metals with low energy ion beam bombardment

Skeren, TomasTomasSkerenVantomme, AndreAndreVantommeTemst, KristiaanKristiaanTemstVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18000Surface nanopatterning of metals with low energy ion beam bombardmentOral presentation