Spampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetDe Simone, DaniloDaniloDe SimonePollentier, IvanIvanPollentierPirkl, AlexanderAlexanderPirklOka, HironoriHironoriOkavan der Heide, PaulPaulvan der Heide2022-03-312022-03-262022-03-302022-03-3120220003-2700WOS:000763582800008https://imec-publications.be/handle/20.500.12860/39522SIMS Analysis of Thin EUV Photoresist FilmsJournal article10.1021/acs.analchem.1c04012WOS:000763582800008LATERAL RESOLUTIONMASSMEDLINE:35076209