Correlation of transport and structural properties in AlGaN/GaN HEMT: Strain modification by means of AlN interlayers

Germain, MarianneMarianneGermainLeys, MaartenMaartenLeysBoeykens, StevenStevenBoeykensRuythooren, WouterWouterRuythoorenSchreurs, DominiqueDominiqueSchreursChoi, Kang-HoonKang-HoonChoiBorghs, GustaafGustaafBorghsVan Daele, BennyBennyVan DaeleVan Tendeloo, GustaafGustaafVan TendelooFarvacque, Jean-LouisJean-LouisFarvacqueCarosella, FrancescaFrancescaCarosella2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7607Correlation of transport and structural properties in AlGaN/GaN HEMT: Strain modification by means of AlN interlayersOral presentation