Schelcher, GuillaumeGuillaumeSchelcherDe Poortere, Etienne P.Etienne P.De PoortereKissoon, NicolaNicolaKissoonPaolillo, SaraSaraPaolilloe Silva, Marsil A. C.Marsil A. C.e SilvaZhang, YichenYichenZhangTabery, CyrusCyrusTaberyMulkens, JanJanMulkensMcManus, MoyraMoyraMcManusLeray, PhilippePhilippeLerayHalder, SandipSandipHalder2022-09-012022-08-082022-09-012022-06-300894-6507https://imec-publications.be/handle/20.500.12860/40234E-test validation of space error budget and metrologyJournal article10.1109/TSM.2022.3187448Electrical & electronic engineeringMetrologySpace ErrorEdge Placement ErrorElectrical test device