Collaert, NadineNadineCollaertDe Keersgieter, AnAnDe KeersgieterDixit, AbhisekAbhisekDixitFerain, IsabelleIsabelleFerainLai, Li-ShyueLi-ShyueLaiLenoble, DamienDamienLenobleMercha, AbdelkarimAbdelkarimMerchaNackaerts, AxelAxelNackaertsPawlak, BartekBartekPawlakRooyackers, RitaRitaRooyackersSchulz, ThomasThomasSchulzSan, Kemal TamerKemal TamerSanSon, Nak JinNak JinSonVan Dal, MarkMarkVan DalVerheyen, PeterPeterVerheyenvon Arnim, KlausKlausvon ArnimWitters, LiesbethLiesbethWittersDe Meyer, KristinKristinDe MeyerBiesemans, SergeSergeBiesemansJurczak, GosiaGosiaJurczak2021-10-172021-10-1720080038-1101https://imec-publications.be/handle/20.500.12860/13545Multi-gate devices for the 32nm technology node and beyondJournal article