Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks

Kaczer, BenBenKaczerVeloso, AnabelaAnabelaVelosoRoussel, PhilippePhilippeRousselGrasser, T.T.GrasserGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-1720091071-1023https://imec-publications.be/handle/20.500.12860/15560Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacksJournal article