Diode analysis of deep submicron CMOS p-well implantation damage

Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysRooyackers, RitaRitaRooyackers2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6742Diode analysis of deep submicron CMOS p-well implantation damageProceedings paper