Understanding the potential and limitations of the HfAlO as interpoly dielectric in floating gate flash memory

Govoreanu, BogdanBogdanGovoreanuDegraeve, RobinRobinDegraeveZahid, MohammedMohammedZahidNyns, LauraLauraNynsCho, Moon JuMoon JuChoKaczer, BenBenKaczerJurczak, GosiaGosiaJurczakKittl, JorgeJorgeKittlGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-1720090167-9317https://imec-publications.be/handle/20.500.12860/15384Understanding the potential and limitations of the HfAlO as interpoly dielectric in floating gate flash memoryJournal article