Increased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer deposition

Groven, BenjaminBenjaminGrovenNalin Mehta, AnkitAnkitNalin MehtaBender, HugoHugoBenderMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardFranquet, AlexisAlexisFranquetNuytten, ThomasThomasNuyttenVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsCaymax, MattyMattyCaymaxRadu, IulianaIulianaRaduDelabie, AnneliesAnneliesDelabie2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30808Increased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer depositionMeeting abstracthttps://ald2018.avs.org/wp-content/uploads/2018/07/ALD-ALE-2018-Schedule.pdf