6.1 family: the next generation of III-V semiconductors for advanced CMOS applications: epitaxial growth and passivation challenges

Merckling, ClementClementMercklingAlian, AliRezaAliRezaAlianFirrincieli, AndreaAndreaFirrincieliJiang, SijiaSijiaJiangCantoro, MircoMircoCantoroDekoster, JohanJohanDekosterCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/211406.1 family: the next generation of III-V semiconductors for advanced CMOS applications: epitaxial growth and passivation challengesMeeting abstract