Smith, Taylor G.Taylor G.SmithAbelgawad, AliAliAbelgawadde Marneffe, Jean-FrancoisJean-Francoisde MarneffeChang, Jane P.Jane P.Chang2024-09-092024-02-112024-09-0920240734-2101WOS:001155109900002https://imec-publications.be/handle/20.500.12860/43530Plasma nitridation for atomic layer etching of NiJournal article10.1116/6.0003263WOS:001155109900002NICKELOXIDATIONNITROGENCOPPER