Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects

Ciofi, IvanIvanCiofiRoussel, PhilippePhilippeRousselBaert, RogierRogierBaertKocaay, DenizDenizKocaayContino, AntoninoAntoninoContinoCroes, KristofKristofCroesSaad, YvesYvesSaadGao, WeiminWeiminGaoMoroz, VictorVictorMorozWilson, ChrisChrisWilsonMocuta, DanDanMocutaTokei, ZsoltZsoltTokei2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30428Impact of litho-patterning variations on the electrical performance and variability of advanced interconnectsProceedings paperhttps://www.lithoworkshop.org/assets/archive/2018/2018-Lithography-Workshop-Program-Book-v1.2.pdf