Verdonck, PatrickPatrickVerdonckLe, Quoc ToanQuoc ToanLeKrishtab, MikhailMikhailKrishtabVanstreels, KrisKrisVanstreelsArmini, SilviaSilviaArminiSimone, A.A.SimoneNguyen, Mai PhuongMai PhuongNguyenVan Elshocht, SvenSvenVan ElshochtBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24762HF etching mechanisms of advanced low-k filmsProceedings paperhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6831851&tag=1