Das, ArghoArghoDasBlanco, VictorVictorBlancoDas, SayantanSayantanDasKissoon, NicolaNicolaKissoonHalder, SandipSandipHalderDusa, MirceaMirceaDusa2023-01-192022-05-222023-01-192021978-1-5106-4552-30277-786XWOS:000792657300022https://imec-publications.be/handle/20.500.12860/39875iN5 EUV Single Expose Patterning Evaluation for Via LayersProceedings paper10.1117/12.2600938978-1-5106-4553-0WOS:000792657300022