Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies

Lauwers, A.A.LauwersBesser, PaulPaulBesserGutt, T.T.GuttSatta, AlessandraAlessandraSattade Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsayRoelandts, NicoNicoRoelandtsLoosen, FredFredLoosenStucchi, MicheleMicheleStucchiVrancken, ChristaChristaVranckenDeweerdt, BrunoBrunoDeweerdtMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3612Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologiesOral presentation