Novel design and fabrication of a MEMS electrostatic vibration scavenger

Sterken, TomTomSterkenFiorini, PaoloPaoloFioriniBaert, KrisKrisBaertBorghs, GustaafGustaafBorghsPuers, BobBobPuers2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9634Novel design and fabrication of a MEMS electrostatic vibration scavengerProceedings paper