Hydrogen-induced thermal donor formation in n-type oxygenated high-resistivity FZ silicon

Rafi, Joan MarcJoan MarcRafiSimoen, EddyEddySimoenClaeys, CorCorClaeysUlyashin, A.G.A.G.UlyashinJob, R.R.JobFahrner, W.R.W.R.FahrnerVersluys, J.J.VersluysClauws, P.P.ClauwsLozano, M.M.LozanoMartinez, C.C.MartinezCampabadal, F.F.Campabadal2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6750Hydrogen-induced thermal donor formation in n-type oxygenated high-resistivity FZ siliconProceedings paper