Optimization of ion implantation condition for depletion-type silicon optical modulators

Yu, HuiHuiYuBogaerts, WimWimBogaertsDe Keersgieter, AnAnDe Keersgieter2021-10-192021-10-1920100018-9197https://imec-publications.be/handle/20.500.12860/18398Optimization of ion implantation condition for depletion-type silicon optical modulatorsJournal article