Stress-induced large-area lift-off of crystalline Si films

Dross, FredericFredericDrossRobbelein, JoJoRobbeleinVandevelde, BartBartVandeveldeVan Kerschaver, EmmanuelEmmanuelVan KerschaverGordon, IvanIvanGordonBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12103Stress-induced large-area lift-off of crystalline Si filmsJournal article