All track directed self-assembly of block copolymers: process flow and origin of defects

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloGronheid, RoelRoelGronheidThode, Christopher J.Christopher J.ThodeWu, HengpengHengpengWuCao, YiYiCaoSomervell, MarkMarkSomervellNafus, KathleenKathleenNafusNealy, Paul F.Paul F.Nealy2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21390All track directed self-assembly of block copolymers: process flow and origin of defectsProceedings paper