Efficient hybrid metrology for focus, CD, and overlay

Tel, WimWimTelSegers, B.B.SegersAnunciado, RoyRoyAnunciadoZhang, Y.Y.ZhangWong, PatrickPatrickWongHasan, T.T.HasanPrentice, C.C.Prentice2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29558Efficient hybrid metrology for focus, CD, and overlayProceedings paperhttps://doi.org/10.1117/12.2257965