High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors

Alvarez, DavidDavidAlvarezFouchier, MarcMarcFouchierHartwich, J.J.HartwichEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7132High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistorsMeeting abstract