De Schepper, PeterPeterDe SchepperMarinov, DaniilDaniilMarinovEl Otell, ZiadZiadEl OtellAltamirano Sanchez, EfrainEfrainAltamirano Sanchezde Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Gendt, StefanStefanDe GendtBraithwaite, Nicholas St. J.Nicholas St. J.Braithwaite2021-10-222021-10-222015-03https://imec-publications.be/handle/20.500.12860/25151Ar and H2 plasma and neutral/ion beam treatment of EUV resistProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2209850