Le, Quoc ToanQuoc ToanLeBaklanov, MikhaïlMikhaïlBaklanovKesters, ElsElsKestersAzioune, AmmarAmmarAziouneStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullartPireaux, Jean-JacquesJean-JacquesPireauxVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005-07https://imec-publications.be/handle/20.500.12860/10758Removal of plasma-modified low-k layer using dilute HF: influence of concentrationJournal article