Kjellman, JonJonKjellmanProst, MathiasMathiasProstMarinins, AleksandrsAleksandrsMarininsTyagi, Hemant KumarHemant KumarTyagiKongnyuy, Tangla DavidTangla DavidKongnyuyKerman, SarpSarpKermanTroia, BenedettoBenedettoTroiaFigeys, BrunoBrunoFigeysDwivedi, Sarvagya PaavanSarvagya PaavanDwivediDahlem, MarcusMarcusDahlemSoussan, PhilippePhilippeSoussanRottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansen2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35394Silicon photonic phase interrogators for on-chip calibration of optical phased arraysProceedings paperhttps://doi.org/10.1117/12.2546542