Biedrzycki, MarkMarkBiedrzyckiAdiga, UmeshUmeshAdigaBarnum, AndrewAndrewBarnumMoussa, AlainAlainMoussaArjavac, JasonJasonArjavacHaynes, Rose MarieRose MarieHaynesCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayBatuk, DmitryDmitryBatuk2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34748EUV photoresist reference metrology using TEM tomographyProceedings paperhttps://doi.org/10.1117/12.2552139