Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applications

Fernández-Bolaños, MontserratMontserratFernández-BolañosVasylchenko, AlexanderAlexanderVasylchenkoDainesi, PaoloPaoloDainesiBrebels, StevenStevenBrebelsDe Raedt, WalterWalterDe RaedtVandenbosch, GuyGuyVandenboschIonescu, Mihai AdrianMihai AdrianIonescu2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15304Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applicationsMeeting abstract