Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods

Caymax, MattyMattyCaymaxDecoutere, StefaanStefaanDecoutereRöhr, ErikaErikaRöhrVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsSprey, HesselHesselSpreyStorm, ArjenArjenStormMaes, J.W.J.W.Maes2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2443Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methodsOral presentation